Growth and Properties of Gadolinium Oxide Dielectric Layers...

Materials Science Forum 2007 Vol. 556-557

Growth and Properties of Gadolinium Oxide Dielectric Layers on Silicon Carbide for High-K Application

Fissel, Andreas, Czernohorsky, M., Dagris, R., Osten, H.J.
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Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.556-557.655
File:
PDF, 747 KB
english, 2007
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