Si-on-insulator films of high crystal perfection by zone melting under a SiO2 cap provided with vent openings
Pfeiffer, Loren, Kovacs, T., West, K. W.Volume:
47
Year:
1985
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.96247
File:
PDF, 542 KB
english, 1985