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[IEEE 1996 IEEE International SOI Conference Proceedings - Sanibel Island, FL, USA (30 Sept.-3 Oct. 1996)] 1996 IEEE International SOI Conference Proceedings - Screening SIMOX for VLSI and ULSI chip production
Liu, S.T., Fechner, P.S., Witcraft, W., Liou, H.K., Rekstad, J., Green, P., Yue, J.Year:
1996
Language:
english
DOI:
10.1109/soi.1996.552486
File:
PDF, 180 KB
english, 1996