[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu,...

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[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2010.06.15-2010.06.17)] 2010 Symposium on VLSI Technology - III–V MOSFETs with a new self-aligned contact

Zhang, Xingui, Guo, Huaxin, Ko, Chih-Hsin, Wann, Clement H., Cheng, Chao-Ching, Lin, Hau-Yu, Chin, Hock-Chun, Gong, Xiao, Lim, Phyllis Shi Ya, Luo, Guang-Li, Chang, Chun-Yen, Chien, Chao-Hsin, Han, Zo
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Year:
2010
Language:
english
DOI:
10.1109/vlsit.2010.5556240
File:
PDF, 274 KB
english, 2010
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