![](/img/cover-not-exists.png)
Etching of zinc selenide and zinc telluride epitaxial films in a secondary afterglow plasma: A statistical experimental design study
Schäfer, P., Hoffmann, N., Parthier, L., Jacobs, K.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578781
Date:
May, 1993
File:
PDF, 646 KB
english, 1993