Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces
Marra, Denise C.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581520
Date:
November, 1998
File:
PDF, 1.06 MB
english, 1998