Summary Abstract: Surface chemical reactions in the...

Summary Abstract: Surface chemical reactions in the metal–organic chemical vapor deposition of aluminum films

Bent, B. E.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575248
Date:
May, 1988
File:
PDF, 465 KB
english, 1988
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