Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes
Min, Hyung Seob, Yang, Min Kyu, Lee, Jeon-KookVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3081966
File:
PDF, 796 KB
english, 2009