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Cyclic Plasma Treatment during ALD Hf1-XZrxO2 Deposition
Bhuyian, M., Misra, D., Tapily, K., Clark, R., Consiglio, S., Wajda, C., Nakamura, G., Leusink, G.Volume:
61
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06102.0041ecst
Date:
March, 2014
File:
PDF, 818 KB
english, 2014