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Impurity segregation correlated with microstructure in...

Impurity segregation correlated with microstructure in buried oxide silicon-on-insulator structures

Puga, M. Margarida, Burk, Dorothea E.
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Volume:
53
Year:
1988
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.100387
File:
PDF, 543 KB
english, 1988
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