Diagnostics of high-frequency discharges in CH4/H2 by time-...

Applied Physics Letters 1990 Vol. 56; Iss. 9

Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy

Kokubo, Terukazu, Tochikubo, Fumiyoshi, Makabe, Toshiaki
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Volume:
56
Year:
1990
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.103320
File:
PDF, 560 KB
english, 1990
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