Two-dimensional imaging of CF[sub 2] density by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1997 / 3 Vol. 15; Iss. 2

Two-dimensional imaging of CF[sub 2] density by laser-induced fluorescence in CF[sub 4] etching plasmas in the gaseous electronics conference reference cell

McMillin, Brian K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580517
Date:
March, 1997
File:
PDF, 553 KB
english, 1997
Conversion to is in progress
Conversion to is failed