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Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil
Arancibia Monreal, J., Chabert, P., Godyak, V.Volume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4825135
File:
PDF, 1.31 MB
english, 2013