Interpretation of recombination at c-Si/SiN[sub x]...

Interpretation of recombination at c-Si/SiN[sub x] interfaces by surface damage

Steingrube, Silke, Altermatt, Pietro P., Steingrube, Daniel S., Schmidt, Jan, Brendel, Rolf
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Volume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3437643
File:
PDF, 993 KB
english, 2010
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