(Invited) High Pressure Sputtering for High-K Dielectric Deposition. Is It Worth Trying
San Andres, E., Feijoo, P. C., Pampillon, M. A., Lucia, M. L., del Prado, A.Volume:
61
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06102.0027ecst
Date:
March, 2014
File:
PDF, 1.57 MB
english, 2014