Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers
Li, Bincheng, Shaughnessy, Derrick, Mandelis, Andreas, Batista, Jerias, Garcia, JoseVolume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1755847
File:
PDF, 438 KB
english, 2004