Hocheffiziente RF-Impedanzanpassnetzwerke

Vakuum in Forschung und Praxis 2014 / 02 Vol. 26; Iss. 1

Hocheffiziente RF-Impedanzanpassnetzwerke

Beckmann, Rudolf, Rack, Andreas, Gesche, Roland, Scherer, Joachim
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Volume:
26
Language:
german
Journal:
Vakuum in Forschung und Praxis
DOI:
10.1002/vipr.201400544
Date:
February, 2014
File:
PDF, 917 KB
german, 2014
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