Ferroelectric properties and switching endurance of Hf...

physica status solidi (RRL) - Rapid Research Letters 2014 / 06 Vol. 8; Iss. 6

Ferroelectric properties and switching endurance of Hf 0.5 Zr 0.5 O 2 films on TiN bottom and TiN or RuO 2 top electrodes

Park, Min Hyuk, Kim, Han Joon, Kim, Yu Jin, Jeon, Woojin, Moon, Taehwan, Hwang, Cheol Seong
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Volume:
8
Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201409017
Date:
June, 2014
File:
PDF, 481 KB
english, 2014
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