Determination of stress in GaAs/Si material

Determination of stress in GaAs/Si material

Li, Chaorong, Mai, Zhenhong, Cui, Shufan, Zhou, Junmin, Ding, Aiju
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Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343787
File:
PDF, 510 KB
english, 1989
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