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X-ray replication of masks using the synchrotron radiation produced by the ACO storage ring
Fay, Bernard, Trotel, Jacques, Petroff, Yves, Pinchaux, Robert, Thiry, PierreVolume:
29
Year:
1976
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.89090
File:
PDF, 472 KB
english, 1976