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Mapping of local oxide properties by quantitative scanning capacitance spectroscopy
Brezna, W., Harasek, S., Lugstein, A., Leitner, T., Hoffmann, H., Bertagnolli, E., Smoliner, J.Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1881773
File:
PDF, 385 KB
english, 2005