Field emitter based extractor gauges and residual gas...

Field emitter based extractor gauges and residual gas analyzers

Dong, Changkun, Myneni, G. Rao
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581722
File:
PDF, 431 KB
english, 1999
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