Electrical properties of selectively deposited tungsten...

Applied Physics Letters 1984 Vol. 44; Iss. 12

Electrical properties of selectively deposited tungsten thin films

Metz, W. A., Mahan, J. E., Malhotra, V., Martin, T. L.
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Volume:
44
Year:
1984
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.94669
File:
PDF, 499 KB
english, 1984
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