Formation and electric property measurement of nanosized patterns of tantalum oxide by current sensing atomic force microscope
Kim, Young-ho, Zhao, Jianwei, Uosaki, KoheiVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1627951
File:
PDF, 1.11 MB
english, 2003