![](/img/cover-not-exists.png)
Compositional fine pattern formation at AlGaAs/GaAs interface by Zn implantation
Iwai, S., Aoyagi, Y., Iwaki, M., Toyoda, K., Namba, S., Doi, A.Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332151
File:
PDF, 353 KB
english, 1983