The effects of radio-frequency bias on electron density in...

The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor

Sobolewski, Mark A., Kim, Jung-Hyung
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Volume:
102
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2815674
File:
PDF, 481 KB
english, 2007
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