Optical Near-Field Probe Integrated With Self-Aligned Bow-Tie Antenna and Electrostatic Actuator for Local Field Enhancement
Iwami, K., Ono, T., Esashi, M.Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.879694
Date:
October, 2006
File:
PDF, 2.48 MB
english, 2006