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[IEEE Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Kyoto, Japan (June 14-16, 2005)] Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Investigation of CMOS devices with embedded sige source/drain on hybrid orientation substrates
Qiqing Ouyang,, Min Yang,, Holt, J., Panda, S., Huajie Chen,, Utomo, H., Fischetti, M., Rovedo, N., Jinghong Li,, Klymko, N., Wildman, H., Kanarsky, T., Costrini, G., Fried, D.M., Bryant, A., Ott,Year:
2005
Language:
english
DOI:
10.1109/.2005.1469199
File:
PDF, 493 KB
english, 2005