Crystal plasticity in Cu damascene interconnect lines undergoing electromigration as revealed by synchrotron x-ray microdiffraction
Budiman, A. S., Nix, W. D., Tamura, N., Valek, B. C., Gadre, K., Maiz, J., Spolenak, R., Patel, J. R.Volume:
88
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2210451
File:
PDF, 526 KB
english, 2006