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Anomalous low-voltage tunneling current characteristics of ultrathin gate oxide (∼2 nm) after high-field stress
Huang, Chia-Hong, Hwu, Jenn-GwoVolume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1364654
File:
PDF, 321 KB
english, 2001