X-ray photoelectron spectroscopy study on the chemistry...

X-ray photoelectron spectroscopy study on the chemistry involved in tin oxide film growth during chemical vapor deposition processes

Mannie, Gilbère J. A., Gerritsen, Gijsbert, Abbenhuis, Hendrikus C. L., van Deelen, Joop, (Hans) Niemantsverdriet, J. W., Thüne, Peter C.
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4756898
File:
PDF, 2.23 MB
english, 2013
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