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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Wafer Scale Encapsulation of Large Lateral Deflection MEMS Structures
Graham, A.B., Messana, M., Hartwell, P., Provine, J., Yoneoka, S., Kim, B., Melamud, R., Howe, R.T., Kenny, T.W.Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805490
File:
PDF, 2.70 MB
english, 2009