Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2014 / 12 Vol. 340
The use of electron Rutherford backscattering to characterize novel electronic materials as illustrated by a case study of sputter-deposited NbOx films
Vos, M., Liu, X., Grande, P.L., Nandi, S.K., Venkatachalam, D.K., Elliman, R.G.Volume:
340
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2014.06.024
Date:
December, 2014
File:
PDF, 1.26 MB
english, 2014