[IEEE 2007 IEEE 20th International Conference on Micro...

  • Main
  • [IEEE 2007 IEEE 20th International...

[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3

Leinenbach, Christina, Seidel, Helmut, Fuchs, Tino, Kronmueller, Silvia, Laermer, Franz
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2007
Language:
english
DOI:
10.1109/memsys.2007.4433014
File:
PDF, 791 KB
english, 2007
Conversion to is in progress
Conversion to is failed