Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 5
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Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits
Lwin, Ma Han Thu, Tun, Thet Naing, Kim, Hui Hui, Kajen, R. S., Chandrasekhar, N., Joachim, C.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3484248
File:
PDF, 1.83 MB
english, 2010