Silicon on insulator nanoscale backside interconnects for...

Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits

Lwin, Ma Han Thu, Tun, Thet Naing, Kim, Hui Hui, Kajen, R. S., Chandrasekhar, N., Joachim, C.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3484248
File:
PDF, 1.83 MB
english, 2010
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