In situ characterization of sputtered thin films using a normal incidence laser reflectometer
Babić, Dubravko I.Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577882
Date:
July, 1992
File:
PDF, 769 KB
english, 1992