[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - The effect of end of range loops on transient enhanced diffusion in Si
Jones, K.S., Moller, K., Chen, J., Puga-Lambers, M., Law, M., Simons, D.S., Chi, P., Freer, B., Bernstein, J., Rubin, L., Simonton, R., Elliman, R.G., Petravic, M., Kringhoj, P.Year:
1997
Language:
english
DOI:
10.1109/iit.1996.586476
File:
PDF, 429 KB
english, 1997
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