Raman microprobe analysis of stress in Ge and GaAs/Ge on...

Journal of Applied Physics 1985 Vol. 57; Iss. 2

Raman microprobe analysis of stress in Ge and GaAs/Ge on SiO2-coated Si substrates

Nishioka, Takashi, Shinoda, Yukinobu, Ohmachi, Yoshiro
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Volume:
57
Year:
1985
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.334800
File:
PDF, 775 KB
english, 1985
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