Process controlled microstructural and binding properties...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1998 / 5 Vol. 16; Iss. 3

Process controlled microstructural and binding properties of hard physical vapor desposition films

Oechsner, H.
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Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581203
Date:
May, 1998
File:
PDF, 1.38 MB
english, 1998
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