ZrO2 and Al2O3 Thin Films on Ge(100) Grown by ALD: An XPS...

Surface Science Spectra 2011 Vol. 18; Iss. 1

ZrO2 and Al2O3 Thin Films on Ge(100) Grown by ALD: An XPS Investigation

Sygellou, Labrini, Gianneta, Violeta, Xanthopoulos, Nikolaos, Skarlatos, Dimitrios, Georga, Stavroula, Krontiras, Christoforos, Ladas, Spyridon, Kennou, Styliani
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Volume:
18
Year:
2011
Language:
english
Journal:
Surface Science Spectra
DOI:
10.1116/11.20100901
File:
PDF, 1.13 MB
english, 2011
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