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Summary Abstract: Spatial variations in the electrode potential of capacitive radio-frequency plasmas due to transverse electromagnetic modes
Savas, Stephen E.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575295
Date:
May, 1988
File:
PDF, 467 KB
english, 1988