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Computer study of boron segregation at the Si(100)–2×1 and Si(111)– 3 × 3 surfaces
Zavodinsky, V. G., Kuyanov, I. A., Chukurov, E. N.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581934
File:
PDF, 339 KB
english, 1999