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Microphotoluminescence evaluation of local strain for...

Microphotoluminescence evaluation of local strain for freestanding Si membranes with SiN deposition

Wang, Dong, Nakashima, Hiroshi, Morioka, Jun, Kitamura, Tokuhide
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Volume:
91
Year:
2007
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2825271
File:
PDF, 714 KB
english, 2007
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