Microphotoluminescence evaluation of local strain for freestanding Si membranes with SiN deposition
Wang, Dong, Nakashima, Hiroshi, Morioka, Jun, Kitamura, TokuhideVolume:
91
Year:
2007
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2825271
File:
PDF, 714 KB
english, 2007