Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1989 / 11 Vol. 7; Iss. 6
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Mechanism of ion beam induced deposition of gold
Dubner, A. D.Volume:
7
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584654
Date:
November, 1989
File:
PDF, 697 KB
english, 1989