Film-thickness resistance monitor for dynamic control of...

Film-thickness resistance monitor for dynamic control of vacuum-deposited films

Provo, J. L.
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.568707
Date:
July, 1975
File:
PDF, 1.17 MB
english, 1975
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