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A two-inch dc/rf circular magnetron sputtering gun for a miniature chamber for an in situ experiment
Rue, Gi-Hong, Kim, Hyung-KookVolume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1149019
File:
PDF, 359 KB
english, 1998