Structure of surface reaction layer of poly-Si etched by...

Structure of surface reaction layer of poly-Si etched by fluorocarbon plasma

Kurihara, Kazuaki, Egami, Akihiko, Nakamura, Moritaka
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2167972
File:
PDF, 520 KB
english, 2006
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