Remote-charge-scattering limited mobility in field-effect transistors with SiO[sub 2] and Al[sub 2]O[sub 3]∕SiO[sub 2] gate stacks
Saito, Shin-ichi, Torii, Kazuyoshi, Shimamoto, Yasuhiro, Tonomura, Osamu, Hisamoto, Digh, Onai, Takahiro, Hiratani, Masahiko, Kimura, Shin’ichiro, Manabe, Yukiko, Caymax, Matty, Maes, Jan WillemVolume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2135878
File:
PDF, 1.25 MB
english, 2005