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[IEEE 2009 Second International Conference in Visualisation (VIZ) - Barcelona, Spain (2009.07.15-2009.07.17)] 2009 Second International Conference in Visualisation - Position Error Inspection for Mounting Wafer in Cleaning Device Using the Radial Shape Board
Lee, Jung Woo, Lee, Byung-Gook, Lee, Joon-Jea, Yoon, JunghoYear:
2009
Language:
english
DOI:
10.1109/viz.2009.52
File:
PDF, 503 KB
english, 2009