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A combined capacitance-voltage and hard x-ray photoelectron spectroscopy characterisation of metal/Al2O3/In0.53Ga0.47As capacitor structures
Lin, Jun, Walsh, Lee, Hughes, Greg, Woicik, Joseph C., Povey, Ian M., O'Regan, Terrance P., Hurley, Paul K.Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4887517
Date:
July, 2014
File:
PDF, 1.54 MB
english, 2014